Integrated assemblies and methods of forming integrated assemblies

ABSTRACT

Some embodiments include an integrated assembly having first and second pillars of semiconductor material laterally offset from one another. The pillars have source/drain regions and channel regions vertically offset from the source/drain regions. Gating structures pass across the channel regions, and extend along a first direction. An insulative structure is over regions of the first and second pillars, and extends along a second direction which is crosses the first direction. Bottom electrodes are coupled with the source/drain regions. Leaker-device-structures extend upwardly from the bottom electrodes. Ferroelectric-insulative-material is laterally adjacent to the leaker-device-structures and over the regions of the bottom electrodes. Top-electrode-material is over the ferroelectric-insulative-material and is directly against the leaker-device-structures. Some embodiments include methods of forming integrated assemblies.

TECHNICAL FIELD

Integrated assemblies. Methods of forming integrated assemblies. Memorydevices (e.g., devices comprising FeRAM configurations). Methods offorming memory devices.

BACKGROUND

Memory devices may utilize memory cells which individually comprise anaccess transistor in combination with a capacitor. In some applications,the capacitor may be a ferroelectric capacitor and the memory may beferroelectric random-access memory (FeRAM).

Computers and other electronic systems (for example, digitaltelevisions, digital cameras, cellular phones, etc.), often have one ormore memory devices to store information. Increasingly, memory devicesare being reduced in size to achieve a higher density of storagecapacity. Even when increased density is achieved, consumers oftendemand that memory devices also use less power while maintaining highspeed access and reliability of data stored on the memory devices.

Leakage within (through) dielectric material of memory cells can beproblematic for at least the reasons that such may make it difficult toreliably store data, and may otherwise waste power. Leakage may bebecome increasingly difficult to control as circuitry is scaled toincreasingly smaller dimensions.

It would be desirable to develop architectures which alleviate, or evenprevent, undesired leakage; and to develop methods for fabricating sucharchitectures. It would be desirable to develop improved memoryarchitecture, and improved methods of forming memory architecture. Itwould also be desirable for such methods to be applicable forfabrication of FeRAM.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1-1B are diagrammatic views of a region of an example constructionat an example process stage of an example method for forming an exampleintegrated assembly. FIG. 1 is a top view. FIGS. 1A and 1B arecross-sectional side views along the lines A-A and B-B, respectively, ofFIG. 1 .

FIGS. 1A-1 and 1B-1 are diagrammatic cross-sectional side views alongthe lines A-A and B-B, respectively, of FIG. 1 , and show materials thatmay be associated with a gap shown in FIGS. 1A and 1B.

FIGS. 2-2B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 1-1B. FIG. 2 is a topview. FIGS. 2A and 2B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 2 .

FIGS. 3-3B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 2-2B. FIG. 3 is a topview. FIGS. 3A and 3B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 3 .

FIGS. 4-4B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 3-3B. FIG. 4 is a topview. FIGS. 4A and 4B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 4 .

FIGS. 5-5B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 4-4B. FIG. 5 is a topview. FIGS. 5A and 5B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 5 .

FIGS. 6-6B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 5-5B. FIG. 6 is a topview. FIGS. 6A and 6B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 6 .

FIGS. 7-7B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 6-6B. FIG. 7 is a topview. FIGS. 7A and 7B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 7 .

FIGS. 8-8B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 7-7B. FIG. 8 is a topview. FIGS. 8A and 8B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 8 .

FIGS. 9-9B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 8-8B. FIG. 9 is a topview. FIGS. 9A and 9B are cross-sectional side views along the lines A-Aand B-B, respectively, of FIG. 9 .

FIGS. 10-10C are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 9-9B. FIG. 10 is a topview. FIGS. 10A and 10B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 10 . FIG. 10C is a three-dimensionalview.

FIGS. 11-11B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 10-10C. FIG. 11 is a topview. FIGS. 11A and 11B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 11 .

FIGS. 12-12B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 11-11B. FIG. 12 is a topview. FIGS. 12A and 12B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 12 .

FIGS. 13-13B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 12-12B. FIG. 13 is a topview. FIGS. 13A and 13B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 13 .

FIGS. 14-14B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 13-13B. FIG. 14 is a topview. FIGS. 14A and 14B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 14 .

FIGS. 15-15B are diagrammatic views of the region of FIGS. 1-1B at anexample process stage following that of FIGS. 14-14B. FIG. 15 is a topview. FIGS. 15A and 15B are cross-sectional side views along the linesA-A and B-B, respectively, of FIG. 15 . The construction of FIGS. 15-15Bmay be considered to be a region of an example integrated assembly or aregion of an example memory device.

FIG. 16 is a schematic diagram of an example memory array comprisingferroelectric capacitors.

FIG. 17 is a schematic diagram of another example memory arraycomprising ferroelectric capacitors.

DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS

Some embodiments include methods of forming memory architecture (e.g.,FeRAM, etc.) in which bottom electrodes are configured as angle plates(e.g., “L-shaped” plates) having vertically-extending legs joining tohorizontally-extending legs. The angle plates may be supported byinsulative structures (rails) that extend along the angle plates and areadjacent to the vertically-extending legs. The insulative structures mayextend along a same direction as digit lines (e.g., a column direction).Ferroelectric material may be along the bottom electrodes, andtop-electrode-material may be over the ferroelectric material.Leaker-device-structures may be provided to extend between the bottomelectrodes and the top-electrode-material. One or more slits may passthrough the top-electrode-material and may be aligned with theinsulative structures to pattern the top-electrode-material into two ormore plates. Voltage of the individual plates may be controlled duringvarious operations associated with a memory array (e.g., READ/WRITEoperations). Example embodiments are described with reference to FIGS.1-17 .

Referring to FIGS. 1-1B, a construction 10 includes vertically-extendingpillars 12. The pillars 12 comprise semiconductor material 14. Thepillars 12 are all substantially identical to one another, with the term“substantially identical” meaning identical to within reasonabletolerances of fabrication and measurement.

The semiconductor material 14 may comprise any suitable composition(s),and in some embodiments may comprise, consist essentially of, or consistof one or more of silicon, germanium, III/V semiconductor material(e.g., gallium phosphide), semiconductor oxide, etc.; with the termIII/V semiconductor material referring to semiconductor materialscomprising elements selected from groups III and V of the periodic table(with groups III and V being old nomenclature, and now being referred toas groups 13 and 15). In some embodiments, the semiconductor material 14may comprise, consist essentially of, or consist of appropriately-dopedsilicon. The silicon may be in any suitable form, and in someembodiments may be monocrystalline, polycrystalline and/or amorphous.

Each of the pillars 12 includes a channel region 20 between an uppersource/drain region 16 and a lower source/drain region 18. Stippling isutilized in the drawings to indicate that the source/drain regions 16and 18 are heavily doped. In some embodiments, the source/drain regions16 and 18 may be n-type doped by incorporating one or both of phosphorusand arsenic into the semiconductor material (e.g., silicon) 14 of thepillars 12. In some embodiments, one or both of the source/drain regions16 and 18 may comprise additional conductive material besides theconductively-doped semiconductor material 14. For instance, one or bothof the source/drain regions 16 and 18 may include metal silicide (e.g.,titanium silicide, tungsten silicide, etc.) and/or other suitableconductive materials (e.g., titanium, tungsten, etc.). In someembodiments, the pillars 12 may be considered to be capped by the uppersource/drain regions 16, with the term “capped” indicating that theupper source/drain regions may or may not include the semiconductormaterial 14 of the pillars 12.

The pillars 12 may be considered to be arranged in an array 15. Thearray may be considered to comprise rows 17 extending along an indicatedx-axis direction, and to comprise columns 19 extending along anindicated y-axis direction.

Insulative material 22 extends between the upper source/drain regions16. The insulative material 22 may comprise any suitable composition(s);and in some embodiments may comprise, consist essentially of, or consistof silicon nitride, silicon dioxide, aluminum oxide, etc. In someembodiments, the insulative material 22 may be referred to as a firstinsulative material.

A planarized upper surface 23 extends across the insulative material 22and the source/drain regions 16. The planarized surface 23 may be formedutilizing chemical-mechanical polishing (CMP) and/or any other suitableprocess(es). In some embodiments, the surface 23 may be referred to asan upper surface of the construction 10.

The construction includes conductive structures (digit lines) 24 underthe pillars 12. The digit lines 24 extend along the column direction(the illustrated y-axis direction) and are electrically coupled with thelower source/drain regions 18 of the pillars. The digit lines maycomprise any suitable electrically conductive composition(s); such as,for example, one or more of various metals (e.g., titanium, tungsten,cobalt, nickel, platinum, ruthenium, etc.), metal-containingcompositions (e.g., metal silicide, metal nitride, metal carbide, etc.),and/or conductively-doped semiconductor materials (e.g.,conductively-doped silicon, conductively-doped germanium, etc.).

In the illustrated embodiment, the digit lines are physically againstthe lower source/drain regions 18. In some embodiments, the digit linesmay comprise metal (e.g., titanium, tungsten, etc.), the source/drainregions 18 may comprise conductively-doped silicon, and metal silicidebe present where the silicon of the source/drain regions 18 interfaceswith the digit lines 24.

Gating structures (wordlines) 25 are alongside the pillars 12 andcomprise gates 26. The gates 26 are spaced from the pillars bydielectric material (also referred to as gate dielectric material) 28.The gating structures 25 extend along the row direction (i.e., along theillustrated x-axis direction), and thus extend in and out of the pagerelative to the cross-sectional view of FIG. 1A.

The gating structures 25 (and associated gates 26) may comprise anysuitable electrically conductive composition(s); such as, for example,one or more of various metals (e.g., titanium, tungsten, cobalt, nickel,platinum, ruthenium, etc.), metal-containing compositions (e.g., metalsilicide, metal nitride, metal carbide, etc.), and/or conductively-dopedsemiconductor materials (e.g., conductively-doped silicon,conductively-doped germanium, etc.).

The dielectric material 28 may comprise any suitable composition(s); andin some embodiments may comprise, consist essentially of, or consist ofone or more of silicon nitride, silicon dioxide, aluminum oxide, hafniumoxide, etc.

The dielectric material 28 is provided between the gates 26 and thechannel regions 20, and may extend to any suitable vertical dimension.In the shown embodiment the dielectric material 28 extends upwardlybeyond the uppermost surfaces of the gates 26. In other embodiments thedielectric material 28 may or may not extend vertically beyond the gates26.

The gates (transistor gates) 26 may be considered to be operativelyadjacent to (operatively proximate to) the channel regions 20 such thata sufficient voltage applied to an individual gate 26 (specificallyalong a wordline 25 comprising the gate) will induce an electric fieldon a channel region near the gate which enables current flow through thechannel region to electrically couple the source/drain regions onopposing sides of the channel region with one another. If the voltage tothe gate is below a threshold level, the current will not flow throughthe channel region, and the source/drain regions on opposing sides ofthe channel region will not be electrically coupled with one another.The selective control of the coupling/decoupling of the source/drainregions through the level of voltage applied to the gate may be referredto as gated coupling of the source/drain regions.

Shield lines 30 are alongside the pillars 12, and are spaced from thepillars by dielectric material 32. The shield lines may be electricallycoupled with ground or any other suitable reference voltage. The shieldlines 30 extend along the row direction (i.e., along the illustratedx-axis direction). The shield lines 30 may be considered to be withinregions between the pillars 12 along the cross-sectional view of FIG.1A.

The dielectric material 32 may comprise any suitable composition(s); andin some embodiments may comprise, consist essentially of, or consist ofone or more of silicon dioxide, silicon nitride, aluminum oxide, hafniumoxide, etc. In the shown embodiment the dielectric material 32 extendsvertically beyond the shield lines 30. In other embodiments thedielectric material 32 may or may not extend vertically beyond theshield lines 30.

The shield lines 30 may comprise any suitable electrically conductivecomposition(s); such as, for example, one or more of various metals(e.g., titanium, tungsten, cobalt, nickel, platinum, ruthenium, etc.),metal-containing compositions (e.g., metal silicide, metal nitride,metal carbide, etc.), and/or conductively-doped semiconductor materials(e.g., conductively-doped silicon, conductively-doped germanium, etc.).

In the shown embodiment, each of the pillars 12 shown along thecross-section of FIG. 1A has one side adjacent a gate 26, and has anopposing side adjacent a shield line 30.

In the shown embodiment, insulative material 34 is over the gates 26 andthe shield lines 30. The insulative material 34 may comprise anysuitable composition(s); and may, for example, comprise silicon dioxide,silicon nitride, aluminum oxide, etc. In some embodiments the material34 may comprise a same composition as one or both of the dielectricmaterials 28 and 32, and in other embodiments the material 34 maycomprise a different composition than at least one of the dielectricmaterials 28 and 32.

Each of the pillars 12 is coupled to one of the wordlines 25 and one ofthe digit lines 24; and accordingly each of the pillars 12 may beconsidered to be uniquely addressed by one of the wordlines and one ofthe digit lines.

The construction 10 may be supported by a semiconductor base (notshown). The base may comprise semiconductor material; and may, forexample, comprise, consist essentially of, or consist of monocrystallinesilicon. The base may be referred to as a semiconductor substrate. Theterm “semiconductor substrate” means any construction comprisingsemiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials), and semiconductive materiallayers (either alone or in assemblies comprising other materials). Theterm “substrate” refers to any supporting structure, including, but notlimited to, the semiconductor substrates described above. In someapplications, the base may correspond to a semiconductor substratecontaining one or more materials associated with integrated circuitfabrication. Such materials may include, for example, one or more ofrefractory metal materials, barrier materials, diffusion materials,insulator materials, etc.

In some embodiments, the construction 10 of FIGS. 1-1B may be consideredto represent a portion of an integrated assembly 36.

In the embodiment of FIGS. 1A and 1B, a gap is provided within theconstruction 10 to break a region of the pillars 12 above the lowersource/drain regions 18. The gap enables the view of construction 10 tobe collapsed into a smaller area, which leaves more room for additionalmaterials formed over the construction 10 at subsequent process stages.It is to be understood that the pillars 12 extend across the illustratedgap. FIGS. 1A-1 and 1B-1 show views along the same cross-sections asFIG. 1A and FIG. 1B, and show the construction 10 without the gap ofFIGS. 1A and 1B. FIGS. 1A-1 and 1B-1 are provided to assist the readerin understanding the arrangement of construction 10. The views of FIGS.1A and 1B (i.e., the views with the gaps in construction 10) will beused for the remaining figures of this disclosure.

Referring to FIGS. 2-2B, the assembly 36 is shown at a process stagesubsequent to that of FIGS. 1-1B. Linear insulative structures (rails,beams) 38 are formed over the upper surface 23 of construction 10. Thestructures 38 comprise insulative material 39. The material 39 maycomprise any suitable composition(s); and in some embodiments maycomprise, consist essentially of, or consist of silicon dioxide, siliconnitride, aluminum oxide, etc. It may be desirable for the material 39 tobe a different composition than the material 22.

The illustrated linear structures 38 are labeled 38 a and 38 b so thatthey may be distinguished relative to one another.

The linear structures 38 extend along the column direction (theillustrated y-axis direction), and are formed to be between columns ofthe pillars 12. Each of the linear structures 38 has a pair of opposinglateral surfaces 41 and 43. The surfaces 41 and 43 may be referred to asfirst and second lateral sides, respectively, of the linear structures38. Each of the linear structures also has a top surface 45.

Each of the linear structures 38 may be considered to be associated witha pair of the columns 19 of the pillars 12, with such associated columnsbeing along the sides 41 and 43. For instance, the columns 19 of FIG. 2are labeled as 19 a-d. Columns 19 a and 19 b are along the sides 41 and43 of the linear structure 38 a and may be considered to be associatedwith such linear structure. Similarly, columns 19 c and 19 d are alongthe sides 41 and 43 of the linear structure 38 b and may be consideredto be associated with such linear structure.

In the shown embodiment, the linear structures 38 laterally overlapportions of the source/drain regions 16 of the associated columns 19, asshown in FIG. 2B. In other embodiments, the linear structures 38 may beformed between the associated columns and may not laterally overlap thesource/drain regions 16 of the associated columns.

The linear structures 38 may be formed with any suitable processing. Forinstance, an expanse of the material 39 may be formed across the uppersurface 23, and such expanse may be patterned utilizing a patterned mask(not shown) and one or more suitable etches.

In the illustrated embodiment, the sidewall surfaces 41 and 43 aresubstantially vertical and extend substantially orthogonally relative tothe substantially horizontal upper surface 23. The term “substantiallyvertical” means vertical to within reasonable tolerances of fabricationand measurement, the term “substantially orthogonal” means orthogonal towithin reasonable tolerances of fabrication and measurement, and theterm “substantially horizontal” means horizontal to within reasonabletolerances of fabrication and measurement.

FIG. 2B shows the pillars 12 to be on a pitch P along the cross-sectionof the figure. The linear structures 38 a and 38 b are spaced from oneanother by a gap having width W. The width W may be any suitabledimension, and in some embodiments may be within a range of from aboutone-fourth of the pitch P to about one-half of the pitch P. In someembodiments, the width W may be within a range of from about 20nanometers (nm) to about 60 nm. The structures 38 a and 38 b have widthsW₁ along the cross-section of FIG. 2B. In some embodiments, a ratio ofW₁:W may be within a range of from about 1:2 to about 1:1.

Referring to FIGS. 3-3B, bottom-electrode-material 40 is formed toextend conformally along the linear structures 38, and along regions ofthe upper surface 23 between the linear structures. Thebottom-electrode-material 40 extends across the upper source/drainregions 16, and is electrically coupled with such source/drain regions.In the illustrated embodiment, the bottom-electrode-material 40 isdirectly against upper surfaces of the source/drain regions 16. Thebottom-electrode-material 40 may have any suitable thickness. In someembodiments, the material 40 may have a thickness within a range of fromabout 1 nm to about 5 nm. The pillars 12 are shown in dashed-line(phantom) view in FIG. 3 to indicate that they are under othermaterials.

The bottom-electrode-material 40 may comprise any suitable electricallyconductive composition(s); such as, for example, one or more of variousmetals (e.g., titanium, tungsten, cobalt, nickel, platinum, ruthenium,etc.), metal-containing compositions (e.g., metal silicide, metalnitride, metal carbide, etc.), and/or conductively-doped semiconductormaterials (e.g., conductively-doped silicon, conductively-dopedgermanium, etc.). In some embodiments, the bottom-electrode-material 40may comprise, consist essentially of, or consist of titanium nitride.

Referring to FIGS. 4-4B, the bottom-electrode-material 40 is etched backfrom upper portions of the linear structures 38 to expose the upperportions of the linear structures (bottom portions of thebottom-electrode-material may be protected with suitable protectivematerial (not shown) during such etch-back). Subsequently,leaker-device-material 47 is formed along the top surfaces 45 andsidewall surfaces 41/43 of the exposed upper portions of the linearstructures 38. The leaker-device-material 47 may be selectivelydeposited to be only along surfaces of the material 39 of the linearstructures 38, or may be deposited over an entirety of the upper surfaceof the assembly 36 and then patterned to remain only along the upperportions of the linear structures 38.

The leaker-device-material 47 may comprise any suitable composition orcombination of compositions. In some embodiments, theleaker-device-material 47 may comprise, consist essentially of, orconsist of one or more of titanium, nickel and niobium in combinationwith one or more of germanium, silicon, oxygen, nitrogen and carbon. Insome embodiments, the leaker device material may comprise, consistessentially of, or consist of one or more of Si, Ge, SiN, TiSiN, TiO,TiN, NiO, NiON and TiON, where the chemical formulas indicate primaryconstituents rather than particular stoichiometries. In someembodiments, the leaker-device-material may comprise, consistessentially of, or consist of titanium, oxygen and nitrogen. In someembodiments, the leaker-device-material may comprise amorphous silicon,niobium monoxide, silicon-rich silicon nitride, etc., either alone or inany suitable combination.

In some embodiments, the leaker-device-material 47 may be a continuouslayer having a thickness within a range of from about 2 angstroms (Å) toabout 20 Å. In some embodiments, the leaker-device-material may be acontinuous layer having a thickness within a range of from about 6 Å toabout 15 Å.

Referring to FIGS. 5-5B, a patterning material 42 is formed over thebottom-electrode-material 40. The patterning material 42 has anundulating topography which includes peaks 44 over the structures 38,and valleys 46 between the peaks. The material 42 may be formed to anysuitable thickness (e.g., a thickness within a range of from about 10 nmto about 30 nm); and may comprise any suitable composition(s). In someembodiments, the material 42 may comprise, consist essentially of, orconsist of one or more of silicon dioxide, silicon nitride and siliconoxynitride.

Referring to FIGS. 6-6B, the assembly 36 is subjected to one or moreetches, and possibly also planarization, to remove the materials 47 and42 from over the linear structures (insulative structures) 38; and toextend the valleys 46 through the materials 40 and 42, and to theinsulative material 22. The valleys 46 thus become openings 46 whichextend through the materials 42 and 40 to the material 22. In theillustrated embodiment, the openings 46 stop at an upper surface of thematerial 22. In other embodiments, the openings 46 may penetrate intothe material 22 (or may even penetrate through the material 22 and stopat the underlying material 34).

The illustrated embodiment shows the upper surfaces of materials 39, 47and 42 being substantially coplanar. In other embodiments at least oneof such upper surfaces may be at a different elevational level relativeto one or more of the others of such upper surfaces.

The illustrated opening 46 may, for example, have a width W₂ along thecross-section of FIG. 6B within a range of from about 10 nm to about 30nm.

Referring to FIGS. 7-7B, fill material 48 is formed within the opening46. Subsequently, CMP and/or other suitable planarization is utilized toform a planar surface 49 extending across the materials 39, 42, 47 and48.

The fill material 48 may comprise any suitable composition(s); and insome embodiments may comprise, consist essentially of, or consist of oneor more of silicon dioxide, silicon nitride and silicon oxynitride.Accordingly, the fill material 48 may or may not be a same compositionas the patterning material 42.

Referring to FIGS. 8-8B, mask structures (beams, rails) 50 are formed onthe planar surface 49, and extend along the row direction (theillustrated x-axis direction). The mask structures 50 may comprise anysuitable composition(s) 51; and in some embodiments may comprise,consist essentially of, or consist of carbon-containing material (e.g.,amorphous carbon, resist, etc.).

The mask structures 50 are spaced from one another by intervening gaps52.

The mask structures 50 may have any suitable dimensions; and may, forexample, have widths W₃ along the cross-section of FIG. 8A within arange of from about 10 nm to about 30 nm.

The embodiment of FIGS. 8 and 8A shows the spacings 52 to all be ofabout the same width along the y-axis direction. In other embodiments(not shown), some of the spacings 52 may vary in width relative toothers along the y-axis direction.

Referring to FIGS. 9-9B, the gaps 52 are extended through the materials40, 42, 47 and 48, and to an upper surface of the insulative material22. In other embodiments (not shown), the gaps 52 may punch into thematerial 22, or even through the material 22 and into the underlyinginsulative material 34.

The gaps 52 may be extended through the materials 42, 47, 48 and 40 withany suitable processing, including, for example, dry etching toanisotropically etch through the materials 42, 47, 48 and 40. In someembodiments, dry etching may be utilized to anisotropically etch throughthe materials 42, 47 and 48, and then a wet etch may be utilized toextend the openings 52 through the thin layer corresponding to thebottom-electrode-material 40.

The patterning of the bottom-electrode-material 40 at the process stageof FIGS. 6-6B (which forms the bottom-electrode-material 40 into stripsextending along the y-axis direction), and the subsequent processingshown in FIGS. 9-9B (which subdivides the strips utilizing the trenches52 that extend along the x-axis direction) may be considered to patternthe bottom-electrode-material 40 into bottom-electrode-structures(bottom electrodes) 54. Each of the bottom-electrode-structures is overone of the source/drain regions 16, and may be considered to beassociated with such one of the vertically-extending pillars 12.

The processing of FIGS. 9-9B may also be considered to pattern strips ofthe leaker-device-material 47 (such strips are shown in the top-downview of FIG. 6 ) into leaker-device-structures 55 (shown in FIG. 9B).The leaker-device-structures 55 are along the sidewalls 41 and 43 of theinsulative structures 38, and are over (and directly against) thebottom-electrode-structures 54. The leaker-device-structures 55 may haveany suitable vertical dimensions (vertical lengths) D, and in someembodiments such vertical dimensions may be less than or equal to about10 nm.

Referring to FIGS. 10-10C, the materials 51, 42 and 48 are removed withone or more suitable etches. The bottom electrodes 54 remain along thelinear structures 38, as do the leaker-device-structures 55.

Each of the bottom-electrode-structures 54 has a vertical segment 56along one of sidewalls (41, 43) of a linear structure (insulativestructure) 38, and has a horizontal segment 58 along a source/drainregion 16. The horizontal segments 58 join to the vertical segments 56at corners 60. The corners 60 may be about 90° (i.e., may beapproximately right angles), with the term “about 90°” meaning 90° towithin reasonable tolerances of fabrication and measurement. In someembodiments, the term about 90° may mean 90°±10°.

In some embodiments, the horizontal segments 58 may be referred to asfirst segments, and the vertical segments 56 may be referred to assecond segments. The first and second segments 58 and 56 may or may notbe substantially orthogonal to one another, depending on whether thesidewalls (41, 43) are vertical (as shown) or tapered.

In the illustrated embodiment, the vertical segments 56 are longer thanthe horizontal segments 58. In other embodiments, the segments 56 and 58may be about the same length as one another, or the horizontal segments58 may be longer than the vertical segments 56.

The bottom-electrode-structures 54 may be considered to be configured asangle plates, and in the shown embodiment are in one-to-onecorrespondence with the upper source/drain regions 16. Each of thebottom electrodes 54 may be considered to be electrically coupled withan associated source/drain region 16 of an associated pillar 12.

The bottom-electrode-structures 54 adjacent the first lateral sides 41of the linear structures 38 may be considered to correspond to a firstset 57 of the bottom-electrode-structures 54, and thebottom-electrode-structures 54 adjacent the second lateral sides 43 ofthe linear structures 38 may be considered to correspond to a second set59 of the bottom-electrode-structures 54. The horizontal segments 58 ofthe bottom electrodes 54 within the first set 57 project in a firstdirection Q (with direction Q being shown in FIG. 10B), and thehorizontal segments 58 of the bottom electrodes 54 within the second set59 project in a second direction R (with direction R being shown in FIG.10B). The direction R is opposite to the direction Q. In someembodiments, the bottom electrodes of the first set 57 may be consideredto be substantially mirror images of the bottom electrodes of the secondset 59, where the term “substantial mirror image” means a mirror imageto within reasonable tolerances of fabrication and measurement.

Two of the bottom electrodes 54 of FIGS. 10-10B are labeled as 54 a and54 b, and such may be referred to as first and second bottom electrodes,respectively. The leaker-device-structures extending upwardly from thebottom electrodes 54 a and 54 b are labeled as 55 a and 55 b, and may bereferred to as first and second leaker-device-structures, respectively.

FIG. 10C shows a three-dimensional view of the configuration of FIGS.10-10B to assist the reader in visualizing such example configuration.

Referring to FIGS. 11-11B, ferroelectric-insulative-material 70 isformed over the bottom-electrode-structures 54, and is directly againstthe bottom-electrode-structures 54. In the shown embodiment, theferroelectric-insulative-material 70 extends across the material 22between the bottom electrodes 54, extends over the bottom electrodes,and extends over the linear features 38. Theferroelectric-insulative-material 70 is laterally adjacent to theleaker-device-structures 55, is laterally adjacent to the verticalsegments 56 of the bottom electrodes, and is over the horizontalsegments 58 of the bottom electrodes.

The ferroelectric-insulative-material 70 may comprise any suitablecomposition or combination of compositions; and in some exampleembodiments may include one or more of transition metal oxide,zirconium, zirconium oxide, niobium, niobium oxide, hafnium, hafniumoxide, lead zirconium titanate, and barium strontium titanate. Also, insome example embodiments the ferroelectric-insulative-material may havedopant therein which comprises one or more of silicon, aluminum,lanthanum, yttrium, erbium, calcium, magnesium, strontium, and arare-earth element.

The ferroelectric-insulative-material 70 may be formed to any suitablethickness; and in some embodiments may be formed to a thickness within arange of from about 30 Å to about 250 Å.

Referring to FIGS. 12-12B, top-electrode-material 68 is formed over theferroelectric-insulative-material 70. The top-electrode-material 68 maycomprise any suitable electrically conductive composition(s); such as,for example, one or more of various metals (e.g., titanium, tungsten,cobalt, nickel, platinum, ruthenium, etc.), metal-containingcompositions (e.g., metal silicide, metal nitride, metal carbide, etc.),and/or conductively-doped semiconductor materials (e.g.,conductively-doped silicon, conductively-doped germanium, etc.). In someembodiments, the top-electrode-material 68 may comprise, consistessentially of, or consist of one or more of molybdenum silicide,titanium nitride, titanium silicon nitride, ruthenium silicide,ruthenium, molybdenum, tantalum nitride, tantalum silicon nitride andtungsten. In some embodiments, the top-electrode-material 68 maycomprise, consist essentially of, or consist of titanium nitride.

The top-electrode-material 68 may have any suitable thickness, and insome embodiments may have a thickness of at least about 10 Å, at leastabout 100 Å, at least about 500 Å, etc.

The electrode materials 40 and 68 may comprise a same composition as oneanother in some embodiments, or may comprise different compositionsrelative to one another. In some embodiments, the electrode materials 40and 68 may both comprise, consist essentially of, or consist of titaniumnitride.

The embodiment of FIGS. 12-12B shows gaps 64 (FIG. 12B) in regionsbetween the structures 38 a and 38 b. In some embodiments, the electrodematerial 68 may be formed thick enough to fill such gaps.

Referring to FIGS. 13-13B, protective material 66 is formed within thegaps 64, and subsequently planarization (e.g., CMP) is utilized to forma planarized surface 67. Upper edges 65 of the leaker-device-structures55 are exposed along the surface 67.

The protective material 66 may comprise any suitable composition(s),such as, for example, silicon dioxide, silicon nitride, carbon,photoresist, etc. If the material 68 fills the gaps 64 at the processstage of FIGS. 12-12B, the protective material 66 of FIGS. 13-13B may beomitted.

Referring to FIGS. 14-14B, additional top-electrode-material 72 isformed over the top-electrode-material 68. The material 72 may bereferred to as plate material. The material 72 may comprise any suitableelectrically conductive composition(s); such as, for example, one ormore of various metals (e.g., titanium, tungsten, cobalt, nickel,platinum, ruthenium, etc.), metal-containing compositions (e.g., metalsilicide, metal nitride, metal carbide, etc.), and/or conductively-dopedsemiconductor materials (e.g., conductively-doped silicon,conductively-doped germanium, etc.).

The material 72 may or may not comprise a same composition as thematerial 68. In some embodiments, the material 68 comprises, consistsessentially of, or consists of titanium nitride, and the material 72comprises, consists essentially of, or consists of tungsten.

The conductive materials 68 and 72 together form a top electrode (or aplate electrode) 73.

The top-electrode-material 72 is directly against the upper edges 65(FIG. 14B) of the leaker-device-structures 55. Accordingly, theleaker-device-structures 55 extend between the bottom electrodes 54 andthe plate electrode 73, and are directly against the bottom electrodes54 and the plate electrode 73.

The bottom electrodes 54, ferroelectric material 70, and plate electrode(top electrode) 73 together form capacitors 82 (one of which is labeledin each of FIGS. 14A and 14B). The capacitors are incorporated intomemory cells 80 (one of which is labeled in each of FIGS. 14A and 14B),with the memory cells forming a memory array 78.

In some embodiments, the leaker-device-structures (leaker devices) 55may be considered to be resistive interconnects coupling bottomelectrodes 54 to the top electrode 73 within the individual capacitors82, and may be utilized to drain excess charge from the bottomelectrodes 54 to alleviate or prevent undesired charge build-up. If theleaker devices 55 are too leaky, then one or more memory cells 80 mayexperience cell-to-cell disturb. If the leaker devices 55 are not leaky(conductive) enough, then excess charge from the bottom electrodes 54may not be adequately drained. Persons of ordinary skill in the art willrecognize how to calculate the resistance desired for the leaker devices55 for a given memory array. In some embodiments, the leaker devices 55may have resistance within a range of from about 0.1 megaohms to about 5megaohms. Factors such as separation between adjacent memory cells,physical dimensions of the memory cells, the amount of charge placed inthe memory cells, a size of the memory array, a frequency of operationsconducted by the memory array, etc., may be considered when making adetermination of the resistance appropriate for the leaker devices 55.

The integrated assembly 36 of FIGS. 14-14B may be considered tocorrespond to a portion of the memory array (memory device) 78. Suchmemory array includes the memory cells 80 which each include a capacitor82. The capacitors each include one of the bottom electrodes 54, andeach include regions of the insulative material 70 and the top electrode(plate electrode) 73.

The individual memory cells 80 each include an access transistor 84coupled with the capacitor 82 (one of the access transistors 84 isdiagrammatically indicated in FIG. 14A). Each of the access transistors84 includes a pillar 12 and a region of a transistor gate 26 adjacentsuch pillar.

Each of the memory cells 80 is uniquely addressed by one of thewordlines 25 in combination with one of the digit lines 24. In someembodiments, the memory cells 80 may be considered to be substantiallyidentical to one another, and to be representative of a large number ofsubstantially identical memory cells which may be formed across thememory array 78. For instance, the memory array may comprise hundreds,thousands, hundreds of thousands, millions, hundreds of millions, etc.,of the memory cells. The wordlines 25 may be representative of a largenumber of substantially identical wordlines that may extend along rowsof the memory array, and the digit lines 24 may be representative of alarge number of substantially identical digit lines that may extendalong columns of the memory array. The term “substantially identical”means identical to within reasonable tolerances of fabrication andmeasurement.

The capacitors 82 are ferroelectric capacitors comprising theferroelectric-insulative-material. Accordingly, the memory array 78 maycomprise FeRAM.

Some embodiments include recognition that it may be advantageous tosub-divide the top electrode 73 into multiple plates. Voltage to theindividual plates may be independently controlled, which may enable theelectric field across the ferroelectric material 70 to be tailoredwithin specific regions of the memory array 78 during memory operations(e.g., READ/WRITE operations). Such may enable charge/discharge rates ofthe capacitors 82 to be increased, which may improve operational speedsassociated with memory cells 80 of the memory array 78. It may beparticularly advantageous for the top-electrode-material to besubdivided with slits extending along the column direction (i.e., they-axis direction of the figures).

FIGS. 15-15B show the assembly 36 after a slit 76 is formed to extendthrough the top-electrode-material 72, and is thereby formed to extendthrough the plate electrode 73. In the shown embodiment, the slit 76stops at the insulative material 39 of the insulative structure 38 b. Inother embodiments, the slit may penetrate into (or even through) theinsulative material 39.

The slit 76 may be patterned with any suitable processing. For instance,a photoresist mask (not shown) may be used to define the location of theslit, one or more etches may be used to etch through the material 72 andform the slit in such location, and then the mask may be removed toleave the configuration of FIGS. 15-15B.

The illustrated slit 76 extends along the column direction (i.e., theillustrated y-axis direction) and is directly over the linear structure38 b. Although one slit 76 is shown, there may be additional slitsformed in other embodiments.

The slit 76 subdivides the top electrode 73 into plate structures(plates) 79 a and 79 b. Although two of the plates 79 are formed in theshown embodiment, in other embodiments there may be a different numberof plates formed depending on the number of the slits 76 formed.Generally, there will be at least two of the plates 79 formed utilizingthe slit(s) 76.

Control circuitry 81 (which may also be referred to as a controlcircuit) may be utilized to provide desired voltages to the plates 79(i.e., to independently control voltages to the different plates 79).

The illustrated plates 79 a and 79 b may be at a different voltagerelative to one another. Specifically, one of the plates may be at afirst voltage, and the other of the plates may be at a second voltagewhich is different than the first voltage. In the shown embodiment, thecontrol circuitry 81 provides voltages E and F to the separate plates 79a and 79 b of FIG. 15B. If there are more than two of the plates 79, thecontrol circuitry 81 may provide a different voltage to at least one ofthe plates relative to at least one other of the plates.

The memory array 78 of FIGS. 15-15B may have any suitable configuration.An example FeRAM array 78 is described schematically with reference toFIG. 16 . The memory array includes a plurality of substantiallyidentical memory cells 80, which each include a ferroelectric capacitor82 and an access transistor 84. Wordlines 25 extend along rows of thememory array, and digit lines 24 extend along columns of the memoryarray. Each of the memory cells is uniquely addressed utilizing acombination of a wordline and a digit line. The wordlines extend todriver circuitry (Wordline Driver Circuitry) 110, and the digit lines 24extend to detecting (sensing) circuitry (Sense Amplifier Circuitry) 112.The top electrodes of the capacitors 82 are shown coupled with platestructures 79, and the plate structures are shown to be coupled with thecontrol circuitry 81.

At least some of the circuitry 110, 112 and 81 may be directly under thememory array 78. One or more of the circuitries 110, 112 and 81 mayinclude CMOS, and accordingly some embodiments may includeCMOS-under-array architecture.

FIGS. 15 and 16 show an embodiment in which a plate structure is sharedby three columns of memory cells. In other embodiments, a differentnumber of memory cells may share a plate structure, depending on thenumber of slits 76 that are formed. For instance, FIG. 17 schematicallyillustrates a region of the memory array 78 similar to that of FIG. 16 ,except that two columns memory cells 80 share each of the platestructures 79.

The assemblies and structures discussed above may be utilized withinintegrated circuits (with the term “integrated circuit” meaning anelectronic circuit supported by a semiconductor substrate); and may beincorporated into electronic systems. Such electronic systems may beused in, for example, memory modules, device drivers, power modules,communication modems, processor modules, and application-specificmodules, and may include multilayer, multichip modules. The electronicsystems may be any of a broad range of systems, such as, for example,cameras, wireless devices, displays, chip sets, set top boxes, games,lighting, vehicles, clocks, televisions, cell phones, personalcomputers, automobiles, industrial control systems, aircraft, etc.

Unless specified otherwise, the various materials, substances,compositions, etc. described herein may be formed with any suitablemethodologies, either now known or yet to be developed, including, forexample, atomic layer deposition (ALD), chemical vapor deposition (CVD),physical vapor deposition (PVD), etc.

The terms “dielectric” and “insulative” may be utilized to describematerials having insulative electrical properties. The terms areconsidered synonymous in this disclosure. The utilization of the term“dielectric” in some instances, and the term “insulative” (or“electrically insulative”) in other instances, may be to providelanguage variation within this disclosure to simplify antecedent basiswithin the claims that follow, and is not utilized to indicate anysignificant chemical or electrical differences.

The terms “electrically connected” and “electrically coupled” may bothbe utilized in this disclosure. The terms are considered synonymous. Theutilization of one term in some instances and the other in otherinstances may be to provide language variation within this disclosure tosimplify antecedent basis within the claims that follow.

The particular orientation of the various embodiments in the drawings isfor illustrative purposes only, and the embodiments may be rotatedrelative to the shown orientations in some applications. Thedescriptions provided herein, and the claims that follow, pertain to anystructures that have the described relationships between variousfeatures, regardless of whether the structures are in the particularorientation of the drawings, or are rotated relative to suchorientation.

The cross-sectional views of the accompanying illustrations only showfeatures within the planes of the cross-sections, and do not showmaterials behind the planes of the cross-sections, unless indicatedotherwise, in order to simplify the drawings.

When a structure is referred to above as being “on”, “adjacent” or“against” another structure, it can be directly on the other structureor intervening structures may also be present. In contrast, when astructure is referred to as being “directly on”, “directly adjacent” or“directly against” another structure, there are no interveningstructures present. The terms “directly under”, “directly over”, etc.,do not indicate direct physical contact (unless expressly statedotherwise), but instead indicate upright alignment.

Structures (e.g., layers, materials, etc.) may be referred to as“extending vertically” to indicate that the structures generally extendupwardly from an underlying base (e.g., substrate). Thevertically-extending structures may extend substantially orthogonallyrelative to an upper surface of the base, or not.

Some embodiments include an integrated assembly comprising a firstpillar of semiconductor material, a second pillar of the semiconductormaterial proximate the first pillar and a gating structure adjacent thefirst pillar and extending along a first direction. An insulativestructure extends along a second direction which is substantiallyorthogonal to the first direction. A first bottom electrode has ahorizontal segment adjacent the first pillar and a vertical segmentextending upwardly from the horizontal segment. A second bottomelectrode has a horizontal segment adjacent the second pillar and avertical segment extending upwardly from the horizontal segment of thesecond bottom electrode. The second bottom electrode is substantially amirror image of the first bottom electrode. The vertical segments of thefirst and second bottom electrodes are adjacent lateral sides of theinsulative structure. First and second leaker-device-structures extendupwardly from the vertical segments of the first and second bottomelectrodes, respectively. Insulative-material is laterally adjacent thefirst and second leaker device-structures, laterally adjacent thevertical segments of the first and second bottom electrodes, and overthe horizontal segments of the first and second bottom electrodes.Top-electrode-material is over the insulative-material and is directlyagainst a top surface of the first leaker-device-structure and a topsurface of the second leaker-device-structure.

Some embodiments include an integrated assembly having a first pillar ofsemiconductor material, and having a second pillar of the semiconductormaterial proximate to the first pillar. The first pillar has a firstupper source/drain region and a first channel region under the firstupper source/drain region, and the second pillar has a second uppersource/drain region and a second channel region under the second uppersource/drain region. Gating structures pass across the first and secondchannel regions, and extend along a first direction. An insulativestructure extends along a second direction which is substantiallyorthogonal to the first direction. A first bottom electrode is coupledwith the first upper source/drain region, and a second bottom electrodeis coupled with the second upper source/drain region. The first andsecond bottom electrodes are configured as first and second angleplates, respectively. The second angle plate is substantially a mirrorimage of the first angle plate. The first and second angle plates havehorizontal segments adjacent to the first and second upper source/drainregions, respectively, and have vertical segments which extend upwardlyfrom the horizontal segments. The vertical segments of the first andsecond angle plates are adjacent to lateral sides of the insulativestructure. First and second leaker-device-structures extend upwardlyfrom the vertical segments of the first and second bottom electrodes,respectively. Ferroelectric-insulative-material is laterally adjacent tothe first and second leaker-device-structures, laterally adjacent to thevertical segments of the first and second bottom electrodes, and overthe horizontal segments of the first and second bottom electrodes.Top-electrode-material is over the ferroelectric-insulative-material andis directly against the first and second leaker-device-structures.

Some embodiments include an integrated assembly having pillars arrangedin an array. The array includes a row direction and a column direction.The pillars have upper source/drain regions, lower source/drain regions,and channel regions between the upper and lower source/drain regions.Gating structures are proximate to the channel regions and extend alongthe row direction. Conductive structures are beneath the pillars and arecoupled with the lower source/drain regions. The conductive structuresextend along the column direction. Insulative structures ae above thepillars and extend along the column direction. Each of the insulativestructures has a first lateral side and an opposing second lateral side,and is associated with a pair of the columns of the pillars along thefirst and second lateral sides. Bottom electrodes are electricallycoupled with the upper source/drain regions. The bottom electrodes areconfigured as angle plates. The angle plates have horizontal segmentsadjacent to the upper source/drain regions, and have vertical segmentswhich extend upwardly from the horizontal segments. The verticalsegments are adjacent to the lateral sides of the insulative structures.The bottom electrodes include a first set adjacent the first lateralsides and a second set adjacent the second lateral sides. The first setof the bottom electrodes has their horizontal segments projecting in afirst direction from their vertical segments, and the second set of thebottom electrodes has their horizontal segments projecting in a seconddirection from their vertical segments. The second direction is oppositeto the first direction. Ferroelectric-insulative-material is over thebottom electrodes. Top-electrode-material is over theferroelectric-insulative-material. Leaker-device-structures extendbetween the top-electrode-material and the bottom electrodes.

Some embodiments include a method of forming an integrated assembly. Aconstruction is formed to have an array of pillars. The pillars comprisesemiconductor material. The array comprises rows and columns, with therows extending along a row direction and with the columns extendingalong a column direction. The pillars have upper source/drain regions,lower source/drain regions, and channel regions between the upper andlower source/drain regions. The construction includes gating structureswhich extend along the row direction, and which are proximate to thechannel regions; and includes conductive structures which extend alongthe column direction, and which are coupled with the lower source/drainregions. The construction includes a first insulative material betweenthe upper source/drain regions of the pillars. An upper surface of theconstruction extends across the first insulative material and acrossupper surfaces of the upper source/drain regions. Linear structures areformed over the upper surface and extend along the column direction.Each of the linear structures has a first lateral side and an opposingsecond lateral side, and is associated with a pair of columns of thepillars along said first and second lateral sides.Bottom-electrode-material is formed conformally along the linearstructures and along regions of the upper surface between the linearstructures. The bottom-electrode-material is patterned intobottom-electrode-structures. The bottom-electrode-structures have firstsegments along the upper surfaces of the upper source/drain regions andhave second segments along the sides of the linear structures.Leaker-device-structures are formed over the bottom-electrode-structuresand along the sides of the linear structures.Ferroelectric-insulative-material is formed over regions of thebottom-electrode-structures and adjacent to theleaker-device-structures. Top-electrode-material is formed over theferroelectric-insulative-material and over the leaker-device-structures.The top-electrode-material is directly against theleaker-device-structures.

In compliance with the statute, the subject matter disclosed herein hasbeen described in language more or less specific as to structural andmethodical features. It is to be understood, however, that the claimsare not limited to the specific features shown and described, since themeans herein disclosed comprise example embodiments. The claims are thusto be afforded full scope as literally worded, and to be appropriatelyinterpreted in accordance with the doctrine of equivalents.

We claim:
 1. An integrated assembly, comprising: a first pillar ofsemiconductor material; a second pillar of the semiconductor materialproximate the first pillar; a gating structure adjacent the first pillarand extending along a first direction; an insulative structure extendingalong a second direction which is substantially orthogonal to the firstdirection; a first bottom electrode having a horizontal segment adjacentthe first pillar and a vertical segment extending upwardly from thehorizontal segment; a second bottom electrode having a horizontalsegment adjacent the second pillar and a vertical segment extendingupwardly from the horizontal segment of the second bottom electrode, thesecond bottom electrode being substantially a mirror image of the firstbottom electrode; the vertical segments of the first and second bottomelectrodes being adjacent lateral sides of the insulative structure;first and second leaker-device-structures extending upwardly from thevertical segments of the first and second bottom electrodes,respectively; insulative-material laterally adjacent the first andsecond leaker device-structures, laterally adjacent the verticalsegments of the first and second bottom electrodes, and over thehorizontal segments of the first and second bottom electrodes; andtop-electrode-material over the insulative-material and directly againsta top surface of the first leaker-device-structure and a top surface ofthe second leaker-device-structure.
 2. The integrated assembly of claim1, wherein the first and second bottom electrodes are L-shaped.
 3. Theintegrated assembly of claim 1, wherein the first and second bottomelectrodes are configured as angle plates.
 4. The integrated assembly ofclaim 1, wherein the insulative-material comprisesferroelectric-insulative-material.
 5. The integrated assembly of claim1, wherein the first pillar comprises a first upper source/drain regionand a first channel region under the first upper source/drain region,and wherein the first bottom electrode is coupled with the first uppersource/drain region.
 6. An integrated assembly, comprising: a firstpillar of semiconductor material, the semiconductor material comprisingsilicon; a gating structure extending along a first direction and havinga gating region operatively proximate a region of the first pillar; asecond pillar of the semiconductor material proximate the first pillar;an insulative structure extending along a second direction which issubstantially orthogonal to the first direction; a first bottomelectrode coupled with a portion of the first pillar, and a secondbottom electrode coupled with a portion of the second pillar; the firstand second bottom electrodes being configured as first and second angleplates, respectively; the second angle plate being substantially amirror image of the first angle plate; the first and second angle plateshaving horizontal segments adjacent the portions of the first and secondpillars, respectively, and having vertical segments extending from thehorizontal segments; the vertical segments of the first and second angleplates being adjacent lateral sides of the insulative structure; firstand second leaker-device-structures extending upwardly from the verticalsegments of the first and second bottom electrodes, respectively;ferroelectric-insulative-material laterally adjacent the first andsecond leaker-device-structures, laterally adjacent the verticalsegments of the first and second bottom electrodes, and over thehorizontal segments of the first and second bottom electrodes; andtop-electrode-material over the ferroelectric-insulative-material anddirectly against the first and second leaker-device-structures.
 7. Theintegrated assembly of claim 6 further comprising a slit passing throughthe top-electrode-material and extending along the second direction, theslit being directly over the insulative structure.
 8. An integratedassembly, comprising: a first pillar of semiconductor material; thefirst pillar comprising a first upper source/drain region and a firstchannel region under the first upper source/drain region; a gatingstructure extending along a first direction and having a gating regionoperatively proximate the first channel region; a second pillar of thesemiconductor material proximate the first pillar; the second pillarcomprising a second upper source/drain region and a second channelregion under the second upper source/drain region; an insulativestructure extending along a second direction which is substantiallyorthogonal to the first direction; a first bottom electrode coupled withthe first upper source/drain region, and a second bottom electrodecoupled with the second upper source/drain region; the first and secondbottom electrodes being configured as first and second angle plates,respectively; the second angle plate being substantially a mirror imageof the first angle plate; the first and second angle plates havinghorizontal segments adjacent the first and second upper source/drainregions, respectively, and having vertical segments extending upwardlyfrom the horizontal segments; the vertical segments of the first andsecond angle plates being adjacent lateral sides of the insulativestructure; first and second leaker-device-structures extending upwardlyfrom the vertical segments of the first and second bottom electrodes,respectively; ferroelectric-insulative-material laterally adjacent thefirst and second leaker-device-structures, laterally adjacent thevertical segments of the first and second bottom electrodes, and overthe horizontal segments of the first and second bottom electrodes; andtop-electrode-material over the ferroelectric-insulative-material anddirectly against the first and second leaker-device-structures.
 9. Theintegrated assembly of claim 8 further comprising a slit passing throughthe top-electrode-material and extending along the second direction, theslit being directly over the insulative structure.
 10. The integratedassembly of claim 8 wherein the vertical segments are longer than thehorizontal segments.
 11. The integrated assembly of claim 8 wherein thefirst and second leaker-device-structures are less than or equal toabout 10 nm in vertical length.
 12. The integrated assembly of claim 8wherein the first and second leaker-device-structures have lateralthicknesses within a range of from about 2 Å to about 20 Å.
 13. Theintegrated assembly of claim 8 wherein the first and secondleaker-device-structures have lateral thicknesses within a range of fromabout 6 Å to about 15 Å.
 14. The integrated assembly of claim 8 whereinthe first and second leaker-device-structures comprise one or more ofTi, Ni and Nb, in combination with one or more of Ge, Si, O, N and C.15. The integrated assembly of claim 8 wherein the first and secondleaker-device-structures comprise one or more of Si, Ge, SiN, TiSiN,TiO, TiN, NiO, NiON and TiON, where the chemical formulas indicateprimary constituents rather than particular stoichiometries.
 16. Theintegrated assembly of claim 8 wherein the first and secondleaker-device-structures comprise titanium, oxygen and nitrogen.
 17. Anintegrated assembly, comprising: pillars arranged in an array; the arraycomprising a row direction and a column direction; the pillars havingupper source/drain regions, lower source/drain regions, and channelregions between the upper and lower source/drain regions; gatingstructures proximate the channel regions and extending along the rowdirection; conductive structures beneath the pillars and coupled withthe lower source/drain regions; the conductive structures extendingalong the column direction; insulative structures above the pillars andextending along the column direction; each of the insulative structureshaving a first lateral side and an opposing second lateral side, andbeing associated with a pair of the columns of the pillars along saidfirst and second lateral sides; bottom electrodes coupled with the uppersource/drain regions; the bottom electrodes being configured as angleplates; the angle plates having horizontal segments adjacent the uppersource/drain regions and having vertical segments extending upwardlyfrom the horizontal segments; the vertical segments being adjacent thelateral sides of the insulative structures; the bottom electrodesincluding a first set adjacent the first lateral sides and a second setadjacent the second lateral sides; the first set of the bottomelectrodes having their horizontal segments projecting in a firstdirection from their vertical segments; the second set of the bottomelectrodes having their horizontal segments projecting in a seconddirection from their vertical segments; the second direction beingopposite to the first direction; insulative-material over the bottomelectrodes; top-electrode-material over the insulative-material; andleaker-device-structures extending between the top-electrode-materialand the bottom electrodes.
 18. The integrated assembly of claim 17further comprising one or more slits passing through thetop-electrode-material and extending along the column direction; each ofsaid one or more slits being directly over an associated one of theinsulative structures.
 19. The integrated assembly of claim 18 whereinsaid one or more slits subdivide the top-electrode-material into two ormore plate structures; and wherein a first voltage associated with atleast one of said two or more plate structures is independentlycontrolled relative to a second voltage associated with at least oneother of said two or more plate structures.
 20. The integrated assemblyof claim 19 the first and second voltages are controlled with a controlcircuit which is coupled with said two or more plate structures.
 21. Theintegrated assembly of claim 17 wherein the insulative structurescomprise silicon dioxide.
 22. The integrated assembly of claim 17wherein the insulative structures comprise silicon nitride.
 23. Theintegrated assembly of claim 17 wherein the vertical segments are longerthan the horizontal segments.
 24. The integrated assembly of claim 17wherein the insulative-material is ferroelectric-insulative-material.25. The integrated assembly of claim 24 wherein theferroelectric-insulative-material is directly against the bottomelectrodes.
 26. The integrated assembly of claim 24 wherein theferroelectric-insulative-material comprises one or more of zirconium,zirconium oxide, niobium, niobium oxide, hafnium, hafnium oxide, leadzirconium titanate, and barium strontium titanate.
 27. The integratedassembly of claim 24 wherein the ferroelectric-insulative-materialfurther includes dopant comprising one or more of silicon, aluminum,lanthanum, yttrium, erbium, calcium, magnesium and strontium.
 28. Amethod of forming an integrated assembly, comprising: forming aconstruction having an array of pillars comprising semiconductormaterial; the array comprising rows and columns, with the rows extendingalong a row direction and with the columns extending along a columndirection; the pillars having upper source/drain regions, lowersource/drain regions, and channel regions between the upper and lowersource/drain regions; the construction including gating structuresextending along the row direction and being proximate the channelregions, and including conductive structures extending along the columndirection and being coupled with the lower source/drain regions; theconstruction including a first insulative material between the uppersource/drain regions of the pillars; an upper surface of theconstruction extending across the first insulative material and acrossupper surfaces of the upper source/drain regions; forming linearstructures over the upper surface and extending along the columndirection; each of the linear structures having a first lateral side andan opposing second lateral side, and being associated with a pair ofcolumns of the pillars along said first and second lateral sides;forming bottom-electrode-material along the linear structures;patterning the bottom-electrode-material intobottom-electrode-structures; the bottom-electrode-structures havingfirst segments along the upper surfaces of the upper source/drainregions and having second segments along the lateral sides of the linearstructures; forming leaker-device-structures over thebottom-electrode-structures and along the lateral sides of the linearstructures; forming ferroelectric-insulative-material over regions ofthe bottom-electrode-structures and adjacent theleaker-device-structures; and forming top-electrode-material over theferroelectric-insulative-material and over the leaker-device-structures,the top-electrode-material being directly against theleaker-device-structures.
 29. The method of claim 28 further comprisingforming one or more slits to pass through the top-electrode-material;said one or more slits extending along the column direction and beingdirectly over one or more of the linear structures; said one or moreslits dividing the top-electrode-material into two or more plates. 30.The method of claim 29 further comprising coupling said two or moreplates with control circuitry configured to selectively control voltageto the two or more plates.
 31. The method of claim 28 wherein the linearstructures laterally overlap the upper source/drain regions of theassociated columns of the pillars.
 32. The method of claim 28 whereinthe first segments are substantially orthogonal to the second segments.33. The method of claim 28 wherein the linear structures comprisesilicon dioxide.
 34. The method of claim 28 wherein the linearstructures comprise silicon nitride.
 35. The method of claim 28 furthercomprising: forming leaker-device-material to extend over tops of thelinear structures and along the lateral sides of the linear structures;and removing the leaker-device-material from over the tops of the linearstructures and patterning the leaker-device-material into theleaker-device-structures.
 36. The method of claim 35 wherein theleaker-device-material is continuous and has a thickness within a rangeof from about 6 Å to about 15 Å.
 37. The method of claim 35 wherein theleaker-device-material comprises one or more of Ti, Ni and Nb, incombination with one or more of Ge, Si, O, N and C.
 38. The method ofclaim 35 wherein the leaker-device-material comprises one or more of Si,Ge, SiN, TiSiN, TiO, TiN, NiO, NiON and TION, where the chemicalformulas indicate primary constituents rather than particularstoichiometries.
 39. The method of claim 28 wherein theferroelectric-insulative-material comprises one or more of zirconium,zirconium oxide, niobium, niobium oxide, hafnium, hafnium oxide, leadzirconium titanate, and barium strontium titanate.
 40. The method ofclaim 39 wherein the ferroelectric-insulative-material further includesdopant comprising one or more of silicon, aluminum, lanthanum, yttrium,erbium, calcium, magnesium and strontium.